Pressure sensor, fabrication and use thereof

Abstract

A pressure sensor structure, a method of fabricating a pressure sensor structure, a method of using the pressure sensor structure, and a device comprising the pressure sensor structure. The pressure sensor structure comprises a chamber having a closed bottom and an open top; an array of working electrode surfaces disposed within the chamber and extending from the bottom of the chamber towards the open top; and a counter electrode formed outside the chamber; wherein the chamber with the working electrode surfaces disposed therein is configured to entrap air when the chamber is immersed in a liquid; wherein the working electrode surfaces are electrically contactable from outside the chamber; and wherein, when the air is entrapped in the chamber, changes in a capacitance between the working electrode and the counter electrode are a measure for pressure changes in the liquid in which the chamber is immersed.

Dependencies are inferred from the claim text.