Method for producing a pressure sensor

A method for producing a pressure sensor, comprising steps as follows:

• providing a ceramic platform;
• providing a measuring diaphragm connected with the platform, enclosing a pressure chamber, and contactable with a pressure to be registered metrologically by the pressure sensor;
• providing an electromechanical transducer, which is embodied in such a manner that it converts a deflection of the measuring diaphragm dependent on the pressure acting on the measuring diaphragm into an electrical variable;
• providing at least one titanium core for an electrically conductive, contact pin to serve for electrical contacting of a component of the electromechanical transducer through the platform;
• producing a layer on a preferably all sides surrounding surface of the titanium core passivating against the alloying of titanium from the titanium core in a melt of an active braze;
• inserting the contact pin in a seat, especially a bore, intended for the contact pin and extending through the platform;
• electrical connecting of the contact pin with the component of the electromechanical transducer on a diaphragm-facing side of the platform;
• and
• joining the contact pin with the platform by means of the active braze on at least a diaphragm-far side of the platform, such that the titanium of the titanium core does not alloy with the melt of the active braze.

A pressure sensor, comprising:

• a ceramic platform;
• a measuring diaphragm connected with the platform, enclosing a pressure chamber, and contactable with a pressure to be registered metrologically by the pressure sensor;
• an electromechanical transducer, which is embodied in such a manner that it converts a deflection of the measuring diaphragm dependent on the pressure acting on the measuring diaphragm into an electrical variable;
• and
• at least one electrically conductive, contact pin, which is connected to a component of the pressure sensor, which extends through the platform, and via which the component connected thereto is electrically connectable;
• wherein the at least one contact pin comprises a titanium core and a layer surrounding a surface of the titanium core, and preventing an alloying the titanium of the titanium core in a melt of an active braze, wherein the at least one contact pin is inserted in an intended seat, especially a bore of the platform, and is electrically connected to its component of the transducer on a diaphragm-facing side of the platform, and wherein the at least one contact pin is joined with the platform on at least a diaphragm-far side of the platform via the active hard solder, or braze, such that the titanium of the titanium core does not alloy with the melt of the active braze.