Rotor and vacuum pump
AssigneeLeybold Aktiengesellschaft
InventorsBenedikt Peters, Christian Berger, Ulrich Goebel
Life of this patent
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Abstract
A vacuum pump and a rotor preferably for a turbomolecular pump, comprising a support member connectable to a rotor shaft having a plurality of rotor blades. Therein each of the plurality of rotor blades comprises a plurality of layers perpendicular to the axial direction of the rotor, wherein each of the plurality of layers is formed at least partially as an arcuate curve connected at their respective end to the support member. The plurality of layers being arranged with a lateral offset with respect to each other.
Claims19
A rotor, preferably for a turbomolecular pump, comprising
- a support member connectable to a rotor shaft having an axial direction,
- a plurality of rotor blades,
- wherein each of the plurality of rotor blades in a cross-section in a plane perpendicular to the axial direction form at least partially an arcuate curve, wherein the respective arcuate curve is connected at their respective ends to the support member, and
- wherein the arcuate curve of a first cross-section and a second cross-section of a respective blade being arranged with an angular offset with respect to each other.
A rotor preferably for a turbomolecular pump, comprising
- a support member connectable to a rotor shaft,
- a plurality of rotor blades,
- wherein each of the plurality of rotor blades comprises a plurality of layers,
- wherein each of the plurality of layers is formed at least partially as an arcuate curve, wherein the arcuate curve is connected at their respective ends to the support member, and
- the plurality of layers of a respective blade being arranged with an angular offset with respect to each other.
Dependencies are inferred from the claim text.