Removal of metal salt precipitates in an electroplating tool

Abstract

Examples are disclosed that relate to the removal of metal salt precipitates from within a circulating loop of an electroplating tool. In one example method, during a processing phase of operation, a metal salt solution is flowed through a circulating loop at a process temperature to deposit a metal on a substrate. The metal salt solution comprises at least a metal cation and a counter ion. In a precipitate removal phase of operation, the metal salt solution is heated to a temperature higher than the process temperature. The heated metal salt solution is then flowed through the circulating loop for a duration to dissolve metal salt precipitates of the metal salt solution within the circulating loop. The metal salt solution is then cooled to the process temperature.

Dependencies are inferred from the claim text.