Conveyance device and conveyance method

Abstract

There are provided a conveyance container provided with a permanent magnet, a plurality of coils that generate thrust for conveying the conveyance container, a drive unit that applies a voltage to each of the plurality of coils, a position detection unit that estimates a position of the conveyance container by estimating a position of the permanent magnet based on current information when a voltage pulse is applied to the coil, a sensing unit that detects the position of the conveyance container by a method other than magnetic field detection, and a control unit that controls the drive unit that drives based on position information of the conveyance container estimated by the position detection unit 30a or detected by the sensing unit. Accordingly, a conveyance device and a conveyance method capable of improving conveyance efficiency compared to a configuration in related art can be provided.

Dependencies are inferred from the claim text.