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US 2026/0225189 A1Published application
Laser processing method and laser processing apparatus
AssigneeGigaphoton Inc.
InventorTakashi ONOSE
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Abstract
A laser processing method includes a first step of processing a pilot hole by irradiating fluororesin with a pulse laser beam having an ultraviolet wavelength so as to draw a first closed trajectory, and a second step of processing a hole by irradiating the fluororesin in which the pilot hole is processed with the pulse laser beam so as to draw a second closed trajectory that is similar in shape to the first closed trajectory and is larger than the first closed trajectory.
Claims20
A laser processing method comprising:
- a first step of processing a pilot hole by irradiating fluororesin with a pulse laser beam having an ultraviolet wavelength so as to draw a first closed trajectory;
- and
- a second step of processing a hole by irradiating the fluororesin in which the pilot hole is processed with the pulse laser beam so as to draw a second closed trajectory that is similar in shape to the first closed trajectory and is larger than the first closed trajectory.
A laser processing apparatus comprising
- a light condensing lens configured to condense a pulse laser beam having an ultraviolet wavelength onto fluororesin that is a workpiece;
- a moving device configured to move an irradiation position of the pulse laser beam on the fluororesin;
- and
- a processor configured to control the moving device,
- the processor executing
- first control for processing a pilot hole by irradiating the fluororesin with the pulse laser beam so as to draw a first closed trajectory, and
- second control for processing a hole by irradiating the fluororesin in which the pilot hole is processed with the pulse laser beam so as to draw a second closed trajectory that is similar in shape to the first closed trajectory and is larger than the first closed trajectory.
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Dependencies are inferred from the claim text.