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US 2026/0225170 A1Published application
Substrate processing device including light source
AssigneeSamsung Electronics Co., Ltd.
InventorsDonghoon KWON, Boun YOON
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Abstract
Provided is a substrate processing device including: a lower electrode; a reaction chamber on the lower electrode; an electrolyte solution in the reaction chamber; and a planarization unit in contact with the electrolyte solution, wherein the planarization unit includes: a light source in the reaction chamber; and an electrode in contact with the light source, and wherein the electrolyte solution includes a photosensitizer and a photo-initiator.
Claims20
A substrate processing device comprising:
- a lower electrode;
- a reaction chamber on the lower electrode;
- an electrolyte solution in the reaction chamber;
- and
- a planarization unit in contact with the electrolyte solution,
- wherein the planarization unit comprises:
- a light source in the reaction chamber;
- and
- an electrode in contact with the light source, and
- wherein the electrolyte solution comprises a photosensitizer and a photo-initiator.
7 more elements
A substrate processing device comprising:
- a lower electrode;
- a reaction chamber on the lower electrode;
- an electrolyte solution in the reaction chamber;
- and
- a planarization unit in contact with the electrolyte solution, wherein the planarization unit comprises:
- a light source in a center region of the planarization unit, and
- an electrode enclosing the light source.
4 more elements
A substrate processing device comprising:
- a lower electrode;
- a reaction chamber on the lower electrode;
- a substrate connected to the lower electrode;
- an electrolyte solution in the reaction chamber;
- an adhesion member connected to an upper portion of the reaction chamber;
- an electrode connected to the adhesion member;
- and
- a light source connected to the electrode,
- wherein the electrolyte solution comprises a photosensitizer and a photo-initiator.
6 more elements
Dependencies are inferred from the claim text.