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AssigneeASML Netherlands B.V.
InventorsManis CHAUDHURI, Christian Gerardus Norbertus Hendricus Marie CLOIN, Andrei Mikhailovich YAKUNIN, Marcus Adrianus VAN DE KERKHOF
Estimating the term…
A cleaning device for removing contamination particles from a surface to be cleaned. The cleaning device comprises an oxygen source configured to emit oxygen and thereby oxidize the contamination particles and the surface to be cleaned. The cleaning device comprises an electron source configured to emit electrons and thereby negatively charge oxidized contamination particles and the surface to be cleaned. The cleaning device comprises a contamination particle collector configured to receive a positive electric charge and thereby attract negatively charged contamination particles ejected from the surface to be cleaned.
1-15. (canceled)
A cleaning device configure to remove contamination particles from a surface to be cleaned, the cleaning device comprising:
The cleaning device of claim 19, wherein the oxygen source, the electron source and the contamination particle collector are arranged with respect to each other such that:
A method comprising:
Dependencies are inferred from the claim text.