Gaas wafer group
AssigneeDowa Electronics Materials Co., Ltd.
InventorJunji SUGIURA
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Abstract
A GaAs wafer group consists of all GaAs wafers having an orientation flat after a step of cleaving the orientation flat, all GaAs wafers consisting of a plurality of GaAs wafers having an identical off angle obtained from an identical GaAs ingot. The mean value of orientation flat orientation accuracies of the GaAs wafer group is within ±0.010°, and the standard deviation of the orientation flat orientation accuracies of the GaAs wafer group is 0.009° or less.
Claims9
A GaAs wafer group consisting of all GaAs wafers having an orientation flat after a step of cleaving the orientation flat, all GaAs wafers consisting of a plurality of GaAs wafers having an identical off angle obtained from an identical GaAs ingot,
- wherein the mean value of orientation flat orientation accuracies of the GaAs wafer group is within ±0.010°, and the standard deviation of the orientation flat orientation accuracies of the GaAs wafer group is 0.009° or less.
Dependencies are inferred from the claim text.