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US 2026/0223631 A1Published application
Substrate transport robot system
AssigneeKawasaki Jukogyo Kabushiki Kaisha
InventorsRyota ONO, Hiroki IMANISHI
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Abstract
A substrate transport robot system includes a substrate holding hand, a robot arm, a drive to serve as a drive source to operate the robot arm in transport operation, and a driven member to transmit a driving force of the drive. The substrate transport robot system also includes a controller configured or programmed to correct a motion of the robot arm in the transport operation based on a shift in an amount of movement in the transport operation caused by a deviation in transmission between the drive and the driven member.
Claims9
A substrate transport robot system comprising:
- a substrate holding hand to hold a substrate;
- a robot arm attached to the substrate holding hand;
- a drive to serve as a drive source to operate the robot arm in transport operation of the robot arm, the transport operation including at least one of placement operation to place the substrate on a mount or holding operation to hold the substrate from the mount;
- a driven member to transmit a driving force of the drive to operate the robot arm;
- and
- a controller configured or programmed to correct a motion of the robot arm in the transport operation based on a shift in an amount of movement in the transport operation caused by a deviation in transmission between the drive and the driven member.
3 more elements
Dependencies are inferred from the claim text.