Piezoelectric Device with Cantilever Configuration and Metamaterial for Enhanced Piezoelectric Response
OwnerMordechai KORNBLUTH, Christoph SCHELLING +1inventors
InventorsMordechai KORNBLUTH, Christoph SCHELLING, Karim GADELRAB
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Abstract
A piezoelectric device includes at least a base and a cantilever. The cantilever has a first end portion anchored by the base and a second end portion unsupported by the base. The cantilever includes at least a piezoelectric element and an augmentation layer. The piezoelectric element includes a first electrode, a piezoelectric layer, and a second electrode. The augmentation supports the piezoelectric element. The augmentation layer has a Poisson's ratio that is less than 0.2 or greater than 0.4.
Claims20
A piezoelectric device comprising:
- a base;
- and
- a cantilever having a first end portion anchored by the base and a second end portion unsupported by the base, the cantilever being deformable and including at least
- (a) a piezoelectric element that includes a first electrode, a piezoelectric layer, and a second electrode, and
- (c) a metamaterial layer that supports the piezoelectric element, the metamaterial layer including metastructures,
- wherein the metamaterial layer is deformable and augments a piezoelectric effect of the piezoelectric layer in response to acoustic pressure such that an augmented voltage differential between the first electrode and the second electrode augments a coupling to a differential in the acoustic pressure.
A microelectromechanical systems (MEMS) device comprising:
- a base;
- and
- a cantilever having a first end portion anchored by the base and a second end portion unsupported by the base, the cantilever including at least
- (b) a piezoelectric element that includes a first electrode, a piezoelectric layer, and a second electrode, and
- (c) an augmentation layer in contact with the first electrode, the augmentation layer having a Poisson's ratio that is less than 0.2 or greater than 0.4.
Dependencies are inferred from the claim text.