Light source device
AssigneeLasertec Corporation
InventorAtsushi TAJIMA
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Abstract
Provided is a light source device that makes it possible to suppress vibration at the surface of a molten metal and uniformize the intensity distribution of illumination light. This light source device (1) comprises: a vessel (10) that has a rotational axis R, the vessel (10) including a cylindrical side wall (15) that rotates around the rotational axis R; a molten metal (20) that contacts at least a portion of an inner surface (30) of the side wall (15); and a processed part (40) that has protrusions (41) and/or recesses (42) formed at a portion thereof. Upon irradiation with laser light LR, the molten metal (20) generates light that includes EUV light LE.
Claims12
A light source device comprising:
- a vessel having a rotation axis and including a cylindrical side wall that rotates about the rotation axis;
- molten metal that touches at least a part of an inner surface of the side wall;
- and
- a processed part including at least one of a convex area and a concave area formed in the processed part,
- wherein the molten metal irradiated by laser light generates light including EUV light.
Dependencies are inferred from the claim text.