System and method for remote sensing a plasma
AssigneeDublin City University
InventorsPatrick J. McNally, Sean Kelly
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Abstract
The invention provides a method and system to remotely monitor a plasma comprising a magnetic field antenna positioned in the near electromagnetic field of a coupled plasma source wherein the magnetic field antenna is a magnetic loop antenna placed in the near electromagnetic field and measure near field signals emitted from the plasma source. A radio system is utilised to analyse the low power signal levels across a wide frequency band. Plasma parameters such as series, or geometric, resonance plasma and electron-neutral collision frequencies are evaluated via a fitting of resonant features present on higher harmonics of the driving frequency to identify arcing, pump or matching failure events, common in fabrication plasma systems.
Claims19
-16. (canceled)
A method to remotely monitor a plasma comprising the steps of:
- positioning an electromagnetic field antenna in the near electromagnetic field of a coupled plasma source;
- and
- measuring near field signals emitted from the plasma source, wherein the near field signals comprises near H field signals or near E field signals.
Dependencies are inferred from the claim text.