Ion implanter
AssigneeNissin Ion Equipment Co., Ltd.
InventorSami K. HAHTO
Life of this patent
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Abstract
An ion implanter includes an ion source that extracts a ribbon beam, a mass analyzing electromagnet, a mass resolution slit, an accelerator/decelerator tube, an energy separation electromagnet, and a process chamber. The ribbon beam that is extracted passes through the mass analyzing electromagnet, the mass resolution slit, the accelerator/decelerator tube, and the energy separation electromagnet to the process chamber, and deflection directions of the ribbon beam by the mass analyzing electromagnet and the energy separation electromagnet are opposite to each other with respect to a traveling direction of the ribbon beam.
Claims20
An ion implanter comprising:
- an ion source that extracts a ribbon beam;
- a mass analyzing electromagnet;
- a mass resolution slit;
- an accelerator/decelerator tube;
- an energy separation electromagnet;
- and
- a process chamber,
- wherein the ribbon beam that is extracted passes through the mass analyzing electromagnet, the mass resolution slit, the accelerator/decelerator tube, and the energy separation electromagnet to the process chamber, and
- wherein deflection directions of the ribbon beam by the mass analyzing electromagnet and the energy separation electromagnet are opposite to each other with respect to a traveling direction of the ribbon beam.
An ion implanter comprising:
- an ion source that extracts a ribbon beam;
- a mass analyzing electromagnet;
- a mass resolution slit;
- a corrector array;
- an accelerator/decelerator tube;
- an energy separation electromagnet;
- a process chamber;
- and
- a controller that controls the ion source, the mass analyzing electromagnet, the mass resolution slit, the corrector array, the accelerator/decelerator tube, and the energy separation electromagnet,
- wherein the ribbon beam that is extracted passes in a traveling direction through the mass analyzing electromagnet, the mass resolution slit, the corrector array, the accelerator/decelerator tube, and the energy separation electromagnet to the process chamber,
- wherein the controller controls the corrector array to adjust a beam current density distribution in a length direction of the ribbon beam, and
- wherein the controller controls the mass analyzing electromagnet and the energy separation electromagnet such that deflection directions of the ribbon beam by the mass analyzing electromagnet and the energy separation electromagnet are opposite to each other with respect to the traveling direction of the ribbon beam.
Dependencies are inferred from the claim text.