Charged particle beam device, image processing method, and image processing program

An image processing method for improving, using a computer, an SNR of a frame image which is a charged particle beam image formed by a detector detecting particles or electromagnetic waves generated by irradiating a sample with a charged particle beam, the image processing method comprising:

• acquiring a plurality of the frame images in an integration direction;
• obtaining a brightness value change curve by using a designated model to fit a change of an image brightness value of a pixel in the integration direction for each pixel constituting the frame image;
• generating a fitted image in which the brightness value of the pixel is a value based on the brightness value change curve;
• and
• outputting the fitted image or an integration image obtained by integrating a plurality of the fitted images.

An image processing program for causing a computer to perform image processing for improving an SNR of a frame image which is a charged particle beam image formed by a detector detecting particles or electromagnetic waves generated by irradiating a sample with a charged particle beam, the image processing program causing the computer to execute:

• a first procedure of acquiring a plurality of the frame images in an integration direction;
• a second procedure of obtaining a brightness value change curve by using a designated model to fit a change of an image brightness value of a pixel in the integration direction for each pixel constituting the frame image;
• a third procedure of generating a fitted image in which the brightness value of the pixel is a value based on the brightness value change curve;
• and
• a fourth procedure of outputting the fitted image or an integration image obtained by integrating a plurality of the fitted images.