Charged Particle Beam Device
AssigneeHitachi High-Tech Corporation
InventorToshiyuki IWAHORI
Life of this patent
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Abstract
Provided is a charged particle beam device including: a sample chamber whose inside is in a vacuum state; a stage that is installed inside the sample chamber and holds a sample; a stage driving device that drives the stage; a charged particle beam irradiation optical system that irradiates the sample held on the stage with a charged particle beam; a needle that holds a sample piece extracted from the sample by the charged particle beam; and a manipulator that drives the needle, in which the manipulator includes a gripping mechanism that grips the needle, and an attachment and detachment driving device that drives the gripping mechanism to attach and detach the needle.
Claims6
A charged particle beam device comprising:
- a sample chamber whose inside is in a vacuum state;
- a stage that is installed inside the sample chamber and configured to hold a sample;
- a stage driving device that is configured to drive the stage;
- a charged particle beam irradiation optical system that is configured to irradiate the sample held on the stage with a charged particle beam;
- a needle that is configured to hold a sample piece extracted from the sample by the charged particle beam;
- and
- a manipulator that drives the needle, wherein
- the manipulator includes
- a gripping mechanism that grips the needle, and
- an attachment and detachment driving device that drives the gripping mechanism to attach and detach the needle.
Dependencies are inferred from the claim text.