Ion source cathode with monolithic radiation shields
AssigneeAxcelis Technologies, Inc.
InventorsJoshua Abeshaus, David Shaner, Makita Erni, Alireza Pirnia, Olivia Campbell, Neil Bassom
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AssigneeAxcelis Technologies, Inc.
InventorsJoshua Abeshaus, David Shaner, Makita Erni, Alireza Pirnia, Olivia Campbell, Neil Bassom
Estimating the term…
An indirectly heated cathode for an ion source has a filament and a monolithic cathode body. The monolithic cathode body extends along an axis from first to second ends, consists of a solid rod, a tubular portion, and one or more thermal shields. The solid rod defines an end cap and extending from the first end toward the second end. The tubular portion is contiguous with the solid rod and defines a cavity extending from the second end toward the first end to a closed end wall. A filament is positioned within the cavity. A thermal shield is contiguous with the tubular portion and/or the solid rod to limit a transfer of thermal radiation from the filament to one or more regions external to the monolithic cathode body. The thermal shields can be disk or an annular shield. The filament is closer to the closed end wall than the disk.
An indirectly heated cathode for an ion source, the indirectly heated cathode comprising:
An indirectly heated cathode for an ion source, the indirectly heated cathode comprising:
A method for forming an indirectly heated cathode, the method comprising:
Dependencies are inferred from the claim text.