Work assistance method and work assistance system

A work assistance system in occurrence of abnormality in a substrate processing apparatus performing predetermined processing on a substrate, comprising:

• a plurality of substrate processing apparatuses disposed in a clean room;
• a mobile terminal including an imaging part and a communication part;
• a position recording part recording positions of the plurality of substrate processing apparatuses in the clean room and an evacuation position in the clean room based on a taken image obtained by taking an image of the plurality of substrate processing apparatuses by the mobile terminal;
• and
• an abnormality processing part detecting a position of the mobile terminal based on an image taken by the mobile terminal when abnormality is detected in any of the plurality of substrate processing apparatuses, specifying an evacuation route from the position of the mobile terminal to the evacuation position, and displaying the evacuation route on the mobile terminal.

A work assistance system in occurrence of abnormality in a substrate processing apparatus performing predetermined processing on a substrate, comprising:

• a substrate processing apparatus disposed in a clean room;
• a mobile terminal including an imaging part and a communication part;
• a storage part storing three-dimensional design information regarding at least a driving part in a processing part included in the substrate processing apparatus;
• a posture specifying part specifying a posture of the driving part based on the three-dimensional design information and an image of the driving part taken by the mobile terminal when abnormality of a substrate processing apparatus is detected during a work in the substrate processing apparatus;
• and
• an abnormality processing part displaying information for evacuating from the substrate processing apparatus on the mobile terminal based on the posture of the driving part specified by the posture specifying part.