Back to results
US 2026/0219694 A1Published application
Mass flow controller health monitoring system
AssigneeApplied Materials, Inc.
InventorMing Xu
Life of this patent
Estimating the term…
Abstract
A method includes receiving a first group of parameters corresponding to a substrate manufacturing process, generating, using a statistical model, a first health index of a flow controller, receiving a second group of parameters corresponding to a flow controller used during the substrate manufacturing process, generating, using a physical model, a second health index of the flow controller, and based on at least one of the first and second health indices, perform a corrective action with respect to the flow controller.
Claims20
A system comprising:
- one or more processing chambers;
- one or more first sensors that each measure at least one of a first group of parameters of a substrate manufacturing process implemented using the one or more processing chambers;
- a flow controller that controls a flow of one or more gases into the processing chamber;
- one or more second sensors that each measure at least one of a second group of parameters of the flow controller during the substrate manufacturing process;
- and
- one or more processors to:
- generate, using a first model, a first health index of the flow controller based on the first group of parameters;
- generate, using a second model, a second health index of the flow controller based on the second group of parameters;
- and
- based on at least one of the first health index or the second health index, perform a corrective action with respect to the flow controller.
7 more elements
A device comprising:
- one or more processors to:
- receive a first group of parameters corresponding to a substrate manufacturing process;
- generate, using a statistical model, a first health index of a flow controller based on the first group of parameters;
- receive a second group of parameters corresponding to the flow controller used during the substrate manufacturing process;
- generate, using a physical model, a second health index of the flow controller based on the second group of parameters;
- and
- based on at least one of the first and second health indices, perform a corrective action with respect to the flow controller.
4 more elements
A method comprising:
- receiving a first group of parameters corresponding to a substrate manufacturing process;
- generating, using a statistical model, a first health index of a flow controller based on the first group of parameters;
- receiving a second group of parameters corresponding to the flow controller used during the substrate manufacturing process;
- generating, using a physical model, a second health index of the flow controller based on the second group of parameters;
- and
- based on at least one of the first and second health indices, perform a corrective action with respect to the flow controller.
3 more elements
Dependencies are inferred from the claim text.