Method for determining an optical property
AssigneeASML Netherlands B.V.
InventorCarolus Johannes Catharina SCHOORMANS
Life of this patent
Estimating the term…
Abstract
A method for determining an optical property of a projection system, the method including: obtaining measured data representative of measured radiation output from the projection system; obtaining an estimated illumination profile of input radiation received by the projection system; generating, based on the estimated illumination profile, estimated data representative of estimated radiation output from the projection system; fitting the estimated data to the measured data to generate a parameter fit; and calculating, based on the parameter fit, an optical property of the projection system.
Claims20
A method for determining an optical property of a projection system, the method comprising:
- obtaining measured data representative of measured radiation output from the projection system;
- obtaining an estimated illumination profile of input radiation received by the projection system;
- generating, by a hardware computer system and based on the estimated illumination profile, estimated data representative of estimated radiation output from the projection system;
- fitting the estimated data to the measured data to generate a parameter fit;
- and
- determining, based on the parameter fit, the optical property of the projection system.
A method for determining an optical property of a projection system, the method comprising:
- obtaining a measured illumination profile of input radiation received by the projection system;
- fitting, by a hardware computer system, the measured illumination profile to a set of predetermined illumination profiles to generate a parameter fit;
- and
- determining, based on the parameter fit, the optical property of the projection system.
A method of determining an estimated illumination profile of a projection system, the method comprising:
- obtaining measured data representative of measured radiation output from the projection system;
- obtaining simulated data representative of simulated radiation output from the projection system, wherein the simulated data comprises multiple sets of simulated data and each set of the multiple sets is based on the input, to the projection system, of radiation with a predetermined illumination profile of a set of predetermined illumination profiles;
- fitting the measured data to the simulated data to generate a profile fit;
- and
- generating, by a hardware computer system and based on the profile fit, the estimated illumination profile, wherein the estimated illumination profile comprises a weighted combination of the set of predetermined illumination profiles.
A method for determining an optical property of a projection system, the method comprising:
- obtaining measured data representative of measured radiation output from the projection system;
- obtaining simulated data representative of simulated radiation output from the projection system, wherein the simulated data comprises multiple sets of simulated data and each set of the multiple sets of simulated data is based on an aberration of a set of known aberrations;
- fitting the measured data to the simulated data to generate a parameter fit;
- and
- determining, by a hardware computer system and based on the parameter fit, the optical property of the projection system.
Dependencies are inferred from the claim text.