Mems mirror, mems mirror array, and radar system

A Miciro-Electro-Mechanical System (MEMS) vibrating mirror, comprising:

• an outer frame, being a hollow structure;
• a rotational structure, located in a hollow region of the outer frame, wherein the rotational structure comprises a reflector frame and a pair of rotating shafts connected between the reflector frame and the outer frame, and the reflector frame comprises a ground electrode;
• a reflector, located on the reflector frame;
• a substrate, wherein the substrate and the outer frame form a cavity;
• and
• a steering electrode group, located on a side of the substrate facing the rotational structure, and the steering electrode group comprises a first steering electrode and a second steering electrode arranged on both sides of the pair of rotating shafts;
• wherein,
• when the ground electrode and the substrate are parallel, a distance between the first steering electrode and the ground electrode gradually decreases from outside to inside of the reflector, and a distance between the second steering electrode and the ground electrode gradually decreases from the outside to the inside of the reflector.