US 2026/0219299 A1 · FAST INSPECTION OF DEVICE UNDER TEST

Abstract

An example method to test a collection of individual devices of a device under test (DUT) uses a test tool having probes and includes sequentially testing multiple pluralities of individual devices while the probes remain in physical contact with the DUT by moving the probes and/or the DUT while maintaining physical contact between the probes and the DUT, where the moving brings, for each successive plurality, the probes (i) into parallel electrical contact with a set of contacts associated with the plurality to drive their parallel electrical excitation, then (ii) out of electrical contact with the set of contacts. Another example method electrically couples a power source to probes positioned at a first side of a DUT and a conductive surface positioned at a second side of the DUT, then controllably electrically excites a plurality of individual devices by applying an alternating voltage to the probes relative to the conductive surface.

Claims14

Dependent claims

A method for testing a collection of individual devices of a device under test (DUT), the method using a test tool comprising a plurality of probes, the method comprising:

sequentially testing multiple pluralities of individual devices, of the collection of individual devices, while the plurality of probes remains in physical contact with the DUT, the sequentially testing comprising:
moving at least one of the plurality of probes or the DUT while maintaining physical contact between the plurality of probes and the DUT, wherein the moving brings, for each successive plurality of the multiple pluralities of individual devices, the plurality of probes (i) into parallel electrical contact with a set of contacts associated with the plurality of individual devices to drive parallel electrical excitation of the plurality of individual devices, then (ii) out of electrical contact with the set of contacts associated with the plurality of individual devices;
and
detecting signals emitted from each plurality of individual devices of the multiple pluralities of individual devices based on the electrical excitation thereof.

1 more element

A method for testing a collection of individual devices of a device under test (DUT), the method using a test tool comprising a plurality of probes, the method comprising:

electrically coupling a power source to (i) the plurality of probes positioned at a first side of the DUT and (ii) a conductive surface positioned at a second side of the DUT;
controllably electrically exciting a plurality of individual devices, of the collection of individual devices, by applying an alternating voltage to the plurality of probes relative to the conductive surface, wherein non-conductive material is disposed between (i) at least one of the conductive surface or the plurality of probes and (ii) respective electrical contacts associated with the plurality of individual devices;
and
detecting signals emitted from the plurality of individual devices based on the electrical excitation thereof.

1 more element

Dependencies are inferred from the claim text.

Fast inspection of device under test

Life of this patent

Fast inspection of device under test

Life of this patent

Abstract

Claims14