Inspection device, inspection method and inspection system
OwnerZhiqiang CHEN, Li ZHANG +6inventors
InventorsZhiqiang CHEN, Li ZHANG, Yuanjing LI, Qingping HUANG, Bo FENG, Liguo ZHANG, Guipei LI, Mingzhi HONG
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OwnerZhiqiang CHEN, Li ZHANG +6inventors
InventorsZhiqiang CHEN, Li ZHANG, Yuanjing LI, Qingping HUANG, Bo FENG, Liguo ZHANG, Guipei LI, Mingzhi HONG
Estimating the term…
Provided are an inspection device and an inspection method thereof, an inspection system. The inspection device includes: a transmission imaging apparatus for constructing a transmission image of an inspected object; and a diffraction detection apparatus for detecting characteristics of at least part of the inspected object. The transmission imaging apparatus defines an inspection channel. The inspection device includes a linear track spanning the inspection channel along a lateral direction. The diffraction detection apparatus is movable along the linear track to a specific position to detect radiations diffracted by at least part of the inspected object.
An inspection device, comprising:
Dependencies are inferred from the claim text.