Illumination system for a mask inspection system
OwnerEugen Anselm, Tobias Hegeleinventors
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Abstract
An illumination system comprising an illumination optics unit is part of a mask inspection system for use with EUV illumination light. A beam homogenization device serves for guiding the illumination light. A guidance of the illumination light via the beam homogenization device is designed with at least one displaceable optics component such that the illumination light is guided via an illumination light sub-channel which varies within an illumination overall channel on account of the displaceable optics unit. The illumination light overall channel is specified by the illumination system for the illumination light. The result is an illumination system with optimized utilization efficiency for the EUV illumination light.
Claims20
An illumination system comprising an illumination optics unit for a mask inspection system for use with EUV illumination light,
- comprising a beam homogenization device for guiding the illumination light,
- wherein the illumination system specifies an illumination light overall channel for the illumination light,
- wherein a guidance of the illumination light via the beam homogenization device is designed with at least one displaceable optics component such that the illumination light is guided via an illumination light sub-channel,
- wherein the illumination light sub-channel is variable within the illumination light overall channel on account of the displaceable optics component.
Dependencies are inferred from the claim text.