Equipment for calibrating particle count measurement device, calibration program, method for determining particle size for calibration, and method for calibrating particle count measurement device

A non-transitory computer-readable storage medium storing a calibration program for use in calibrating a particle number measurement device, the program causing a computer to execute the steps of:

• causing a particle generation unit to generate particles;
• causing an input unit to receive an input of a target particle size from a user;
• causing a particle classification unit to classify the particles generated by the particle generation unit and extract particles corresponding to the target particle size received via the input unit;
• causing a particle detection unit to detect the particles extracted by the particle classification unit;
• causing a calculation unit to determine a degree of change in particle size relative to the target particle size for each of the particles that have reached the particle detection unit, based on a physical quantity factor for a change in particle size at the particle detection unit, or a particle size distribution of the particles at the particle detection unit, and calculate a correction amount for particle sizes of particles to be extracted by the particle classification unit, such that the particle sizes of the particles reaching the particle detection unit match the target particle size;
• and
• causing a correction instruction unit to instruct the particle classification unit to change the particle sizes of the particles to be extracted by the particle classification unit into a calibration particle size, based on the correction amount calculated by the calculation unit.

A method of determining a calibration particle size for use in calibrating a particle number measurement device, the method comprising the steps of:

• causing a particle generation unit to generate particles;
• causing an input unit to receive an input of a target particle size from a user;
• causing a particle classification unit to classify the particles generated by the particle generation unit and extract particles corresponding to the target particle size received via the input unit;
• causing a particle detection unit to detect the particles extracted by the particle classification unit;
• causing a calculation unit to determine a degree of change in particle size relative to the target particle size for each of the particles that have reached the particle detection unit, based on a physical quantity factor for a change in particle size at the particle detection unit, or a particle size distribution of the particles at the particle detection unit, and calculate a correction amount for particle sizes of particles to be extracted by the particle classification unit, such that the particle sizes of the particles reaching the particle detection unit match the target particle size;
• and
• causing a correction instruction unit to instruct the particle classification unit to change the particle sizes of the particles to be extracted by the particle classification unit into a calibration particle size, based on the correction amount calculated by the calculation unit.