Fourier Transform Spectrometr
AssigneeSkm Instruments, LLC
InventorsKeith Carron, Mark Watson, Shane Buller
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AssigneeSkm Instruments, LLC
InventorsKeith Carron, Mark Watson, Shane Buller
Estimating the term…
A Fourier Transform spectrometer including an interferometer is provided. In one embodiment, the FT spectrometer comprises an excitation light source, a beam splitter adapted to separate a metrology signal from the excitation light source, and direct the metrology signal through an interferometer to a metrology detector. The FT spectrometer is further adapted to receive a spectroscopy signal from a sample and pass the spectroscopy signal through the interferometer to a spectrometer detector. Methods of correction for motion of a mirror of the interferometer are provided. Further, a Total Spectroscopy approach including a spectroscopy signal including Raman scattering, fluorescence, and near infrared absorption components is also provided.
A Fourier Transform (FT) spectrometer comprising:
A method of providing a Fourier Transform (FT) spectroscopy comprising;
A method of correcting a signal from an interferometer of an FT Spectrometer comprising:
A Total Spectroscopy method comprising:
Dependencies are inferred from the claim text.