Adjustment method, adjustment system and laser beam unit
AssigneeTRUMPF Lasersystems for Semiconductor Manufacturing GmbH
InventorTom BOLZE
Life of this patent
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Abstract
A method for adjusting a beam caustic of a laser beam generated by a laser beam unit is provided. The laser beam unit includes an optical device. The method includes ascertaining three beam diameters of the laser beam at three measurement planes positioned along a laser beam propagation direction, determining the beam caustic of the laser beam by analytically calculating beam propagation parameters of the laser beam based on the three ascertained beam diameters, ascertaining a laser beam deviation by comparing the beam caustic with a target beam caustic of the laser beam, and adjusting the laser beam unit based on the ascertained laser beam deviation.
Claims12
A method for adjusting a beam caustic of a laser beam generated by a laser beam unit, the laser beam unit having an optical device, the method comprising:
- a) ascertaining three beam diameters of the laser beam at three measurement planes positioned along a laser beam propagation direction;
- b) determining the beam caustic of the laser beam by analytically calculating beam propagation parameters of the laser beam based on the three ascertained beam diameters;
- c) ascertaining a laser beam deviation by comparing the beam caustic with a target beam caustic of the laser beam;
- and
- d) adjusting the laser beam unit based on the ascertained laser beam deviation.
Dependencies are inferred from the claim text.