Repulsive electrical softening for capacitive sensors and actuators

An actuator, comprising:

• a grounded substrate;
• an insulating layer on the substrate;
• a first repulsive electrode formed on the insulating layer;
• a second repulsive electrode formed on the insulating layer;
• a first fixed electrode adjacent the first repulsive electrode;
• a second fixed electrode adjacent the second repulsive electrode;
• and
• a movable component held between the first fixed electrode and second fixed electrode, the movable component configured to change a capacitance based upon a predetermined condition.

A method of fabricating a sensor, comprising:

• placing an insulating layer on a substrate;
• creating a first set of features on the insulating layer, the first set of features including:
• a first electrode;
• a second electrode;
• and
• a movable component;
• and
• forming a fluid flow passage in the insulating layer around, at least, the movable component, with the fluid flow passage configured to allow a fluid flow therethrough such that the movable component changes a capacitance based upon a detected fluid flow.