Mems sensor component and rotation rate sensor

A microelectromechanical system (MEMS) sensor component, comprising:

• a substrate having a substrate surface;
• a first rotor mass;
• and
• two first drive elements which are connected to the first rotor mass via first drive coupling structures and are configured to set the first rotor mass into a first rotational oscillating movement about a first axis of rotation oriented perpendicular to the substrate surface;
• wherein, when a rotation rate is applied to the MEMS sensor component, the first rotor mass and/or the first drive coupling structures are configured to:
• promote a first tilting movement of the first rotor mass about a first tilt axis oriented parallel to the substrate surface, and
• suppress a second tilting movement of the first rotor mass about a second tilt axis oriented perpendicular to the first tilt axis.

A rotation rate sensor, comprising:

• a microelectromechanical system (MEMS) sensor component;
• and
• a signal processing unit for at least one of:
• applying, receiving or processing signals of the MEMS sensor component;
• wherein the MEMS sensor component includes:
• a substrate having a substrate surface,
• a first rotor mass, and
• two first drive elements which are connected to the first rotor mass via first drive coupling structures and are configured to set the first rotor mass into a first rotational oscillating movement about a first axis of rotation oriented perpendicular to the substrate surface;
• wherein, when a rotation rate is applied to the MEMS sensor component, the first rotor mass and/or the first drive coupling structures are configured to:
• promote a first tilting movement of the first rotor mass about a first tilt axis oriented parallel to the substrate surface, and
• suppress a second tilting movement of the first rotor mass about a second tilt axis oriented perpendicular to the first tilt axis.