Haptic feedback device for virtual reality (vr) and augmented reality (ar)

An integrated device, comprising:

• a device array fixture having a first side and a second side;
• a first cavity on the first side the device array fixture;
• a first piezoelectric ceramic over the first cavity;
• a first electrostatic valve within the first cavity opposite the first piezoelectric ceramic;
• a second electrostatic valve within the first cavity opposite the first piezoelectric ceramic;
• a first elastic compartment coupled to the first side of the device array fixture and the first electrostatic valve and containing a first reservoir of low compressibility fluid;
• a second elastic compartment coupled to the second side of the device array fixture and the second electrostatic valve and containing a second reservoir of low compressibility fluid;
• and
• a belt affixed to the device array fixture and surrounding the second elastic compartment.

A method of forming an integrated device, comprising:

• form a first micropump structure on a first plurality of substrates comprising:
• a first cavity,
• a piezoelectric ceramic extending over the first cavity,
• a first electrostatic valve coupled to the first cavity opposite the piezoelectric ceramic, and
• a second electrostatic valve coupled to the first cavity opposite the piezoelectric ceramic;
• affix the first plurality of substrates to a device array fixture such that the first electrostatic valve is coupled to an opening in a first side of the device array fixture and the second electrostatic valve is coupled to an opening in a second side of the device array fixture;
• affix a first elastic compartment comprising a first reservoir of low compressibility fluid to the device array fixture, such that the first reservoir is coupled to the first electrostatic valve through the first side of the device array fixture;
• affix a second elastic compartment comprising a second reservoir of low compressibility fluid to the device array fixture such that the second reservoir is coupled to the second electrostatic valve through the second side of the device array fixture;
• and
• affix a belt to the device array fixture, the belt surrounding the second elastic compartment such that the second elastic compartment is inside a loop made by the belt and the device array fixture while the first elastic compartment is outside the loop made by the belt and the device array fixture.