Crystal production method, high-frequency heating device, and crystal producing apparatus
AssigneesA. C. Company, Tohoku University
InventorsTaketoshi TOMIDA, Akira YOSHIKAWA, Vladimir KOCHURIKHIN, Liudmila GUSHCHINA, Yasuhiro SHOJI, Isao TAKAHASHI, Kei KAMADA
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Abstract
The high-frequency heating device includes at least a phase difference detector, a frequency controller, an inverter, and an LCR circuit, and the phase difference detector detects the phase difference between the high-frequency voltage generated by the frequency controller and the high-frequency current flowing through the LCR circuit, and the inverter updates the driving frequency of the high-frequency voltage based on the phase difference to control the current in the LCR circuit.
Claims13
A crystal production method using a high-frequency heating device equipped with an LCR circuit including a heating coil for heating a raw material, the crystal production method comprising:
- a melting step of melting a raw material;
- and
- a crystal growing step of growing a crystal, wherein
- heating is performed by controlling a driving frequency of induction heating in at least one of the melting step and the crystal growing step.
A high-frequency heating device comprising, at least:
- a phase difference detector;
- a frequency controller;
- an inverter;
- and
- an LCR circuit, wherein
- the phase difference detector is configure to detect the phase difference between the high-frequency voltage generated by the frequency controller and the high-frequency current flowing through the LCR circuit, or the phase difference between the high-frequency voltage applied to the LCR circuit and the high-frequency current flowing through the LCR circuit, and
- the inverter is configured to update the drive frequency of the high-frequency voltage based on the phase difference to control the current of the LCR circuit.
A crystal producing apparatus for growing a crystal using a raw material melt, comprising:
- a high-frequency heating device having an LCR circuit containing a heating coil for heating the raw material;
- and
- a coolable basket for holding the raw material, wherein
- a temperature of the melt is controlled by controlling a frequency of a high-frequency voltage applied to the heating coil arranged outside the basket.
Dependencies are inferred from the claim text.