Method and system of growing and using cesium lithium borate crystals
AssigneeKLA Corporation
InventorsJohn Fielden, Yung-Ho Alex Chuang
Life of this patent
Estimating the term…
Abstract
A method and system for growing a cesium lithium borate (CsLiB6O10) crystal is provided. Lasers and characterization systems incorporating a cesium lithium borate crystal grown according to the method disclosed herein are also provided. The method includes growing a crystal from a melt that contains chloride (Cl-) ions. These crystals have lower defect density and contain fewer OH groups and/or less water than crystals grown by conventional techniques and so are suitable for use at high powers and short deep UV wavelengths. A frequency conversion apparatus and an optical system containing a frequency conversion apparatus are also provided.
Claims16
A method of manufacturing a cesium lithium borate crystal comprising:
- forming a material comprising Cs, Li, B, O, and Cl;
- heating the material to form a melt;
- controlling a temperature of the melt;
- lowering a seed crystal into the melt, and
- adjusting the temperature of the melt to grow a cesium lithium borate crystal.
A system for growing a cesium lithium borate crystal comprising:
- a crucible configured to contain a melt comprising cesium, lithium, boron, oxygen, and chloride ions;
- a seed holder configured to position a seed crystal in the melt;
- one or more heating elements configured to control a temperature of the melt and the seed crystal;
- and
- a controller configured to maintain the melt at a temperature above 850°C and the seed crystal at a temperature within a range of 840°C to 860°C during growth of the crystal.
16-016. A cesium lithium borate single crystal, wherein the single crystal is grown from a melt comprising cesium, lithium, boron, oxygen, and between about 0.1 mole-percent and about 10 mole-percent chloride ions, and wherein the single crystal has a hydroxyl impurity content and a crystallographic defect density that are each lower than those of cesium lithium borate single crystals grown from melts that are free of chloride ions.
Dependencies are inferred from the claim text.