Deposition device for preventing vibration

Abstract

A deposition device may include: a deposition chamber configured to provide a deposition space; a first plate configured to be separable from an upper side of the deposition chamber; a second plate disposed above the first plate; a hexapod connected to the second plate and extending to the deposition space while passing through the first plate; an electrostatic chuck disposed below the hexapod and configured to fix a substrate onto which deposition particles are to be deposited; a first support part extending from the second plate to the deposition space and configured to support a mask configured to face the substrate; and a vibration prevention part disposed between the first plate and the second plate and configured to prevent vibration of the first plate from being transmitted to the second plate.

Dependencies are inferred from the claim text.