Ozone water generation device and generation method

An ozone water generation method comprising:

• a circulation operation of circulating, by a circulation line, a solvent that is capable of dissolving ozone gas;
• a temperature control operation of controlling a temperature of the solvent, in a state in which the solvent is circulated by the circulation operation;
• and
• a gas-liquid mixing operation of allowing the solvent to flow into a gas-liquid mixer to which the ozone gas is supplied at an arbitrary supply pressure, in the state in which the solvent is circulated by the circulation operation,
• wherein the gas-liquid mixer includes:
• a solvent flow path through which the solvent flows;
• and
• an ozone gas introduction path that is connected to the solvent flow path and introduces the ozone gas supplied to the gas-liquid mixer into the solvent flow path,
• wherein the temperature control operation is performed to control the temperature of the solvent such that a vapor pressure of the solvent is less than the supply pressure of the ozone gas, and
• wherein the ozone gas supplied by the gas-liquid mixing operation has an ozone concentration of 50 volume % or greater and an ozone partial pressure of 30 kPa (abs) or less.