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US 2026/0217018 A1Published application
Device and method for processing a substrate in an evacuated processing space
AssigneeEV Group E. Thallner GmbH
InventorMartin EIBELHUBER
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Abstract
A device and a method for the processing, in particular nano-embossing, of a substrate in a local and fluidically tight processing space is disclosed.
Claims14
A method for processing a substrate, comprising:
- providing a substrate mounting arrangement for mounting the substrate,
- providing a processing device for the processing of the substrate, the processing device including a flexible film stamp for the processing of the substrate,
- forming a local and fluidically tight processing space between the substrate mounting arrangement and the processing device,
- evacuating the processing space, and
- processing the substrate,
- wherein the evacuating of the processing space takes place after the forming of the processing space,
- wherein a fluidically tight flushing space between the processing device and the film stamp is flushed in the processing of the substate, and
- wherein the processing space and the flushing space are separated from one another fluidically by the film stamp.
5 more elements
(canceled)
A device for processing a substrate, comprising:
- a substrate mounting arrangement for mounting the substrate,
- a processing device for processing the substrate,
- means for forming of a local and fluidically tight processing space between the substrate mounting arrangement and the processing device,
- evacuation means for evacuating the processing space,
- processing means for the processing of the substrate, the processing means comprising a flexible film stamp for embossing the substrate, and
- flushing means for forming a fluidically tight flushing space between the device and the film stamp, the flushing space being separated fluidically by the film stamp from the processing space,
- wherein the film stamp is deformed by the flushing means in a targeted manner.
4 more elements
-13. (canceled)
Dependencies are inferred from the claim text.