End Effector with Replaceable Pads
OwnerDaniel McGillicuddyinventor
Life of this patent
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Abstract
An end effector that includes replaceable pads is disclosed. The pads may be constructed from a different dielectric material than the end effector. This difference in dielectric material may help reduce particle generation and workpiece damage. Additionally, the pad is attached to the end effector using a latch and a spring, which allows the assembly to remain operational over a wide range of temperatures, even if the end effector and pad have coefficients of thermal expansion that differ by an order of magnitude or more. This assembly may operate to temperatures from −150° C. up to 500° C.
Claims20
An end effector for use in a semiconductor processing system, comprising:
- an arm made of a first material and having a plurality of openings;
- a plurality of pads, made from a second material, each pad disposed in a respective opening;
- wherein each pad comprises a rounded head and a shaft that passes through the respective opening, the shaft having a first shaft portion attached to the rounded head, and a second shaft portion at a distal end of the shaft;
- a latch to engage with the second shaft portion to lock the pad in place;
- and
- a spring disposed between the rounded head and the latch to apply tension to the pad and allow for thermal expansion and contraction of the pads.
A method for replacing pads located on an end effector disposed in a semiconductor processing system, the method comprising:
- rotating a latch used to secure a pad to an arm of the end effector, such that the latch moves from a locked position to an unlocked position;
- detaching the latch from the pad;
- removing the pad from the arm of the end effector;
- placing a new pad in an opening in the arm of the end effector;
- sliding the latch over a shaft of the new pad;
- and
- rotating the latch from the unlocked position to the locked position.
Dependencies are inferred from the claim text.