Ultra-precision conformal polishing method and apparatus based on electrochemical gradient-thickening and vibration-induced micro-motion

An ultra-precision conformal polishing method based on electrochemical gradient-thickening and vibration-induced micro-motion, wherein the method utilizes an electrochemical gradient-thickening phase to induce electrochemical interfacial reactions that guide a directional motion of charged particles and control a particle aggregation effect of a suspension;

• and a flexible fluid abrasive tool is then used to generate a vibration-induced microdynamic force in a workpiece direction for efficient conformal material removal;
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• the ultra-precision conformal polishing method based on electrochemical gradient-thickening and vibration-induced micro-motion comprises the following steps:
• (1) placing an anode workpiece on a polishing worktable, connecting an anode clamp to the anode workpiece, and connecting a cathode clamp to a flexible conformal component of a conformal polishing device;
• wherein a rotor is disposed within an inner cavity of the flexible conformal component, and a stator is disposed at an eccentric position of an outer cavity of the flexible conformal component, thereby maintaining a predetermined degree of airtightness;
• the flexible conformal component deforms according to a shape of the anode workpiece, thereby closely conforming to a surface of the anode workpiece;
• when the flexible conformal component rotates with a rotating shaft, the flexible conformal component generates a vibration-induced microdynamic force in the workpiece direction;
• and the vibration-induced microdynamic force induces the flexible conformal component to form a whirling motion, thereby achieving efficient conformal material removal;
• (2) activating a numerical control unit to control path and process parameters of the flexible conformal component, such that a starting point conforms to the surface of the anode workpiece;
• (3) adding an electrochemical gradient-thickening polishing suspension containing nano-abrasive particles to a material storage tank, activating a hydraulic pump, and conveying the electrochemical gradient-thickening polishing suspension through a conveying pipe into the conformal polishing device;
• (4) turning on a circuit controller and an electrochemical thickening generator, and inducing an electrochemical interface reaction by an electrochemical gradient-thickening phase that guides a directional motion of charged particles and controls a particle aggregation effect of the electrochemical gradient-thickening polishing suspension, such that the flexible conformal component exhibits real-time weak-rigidity rheological behavior in a fluid flow, thereby forming a flexible fluid abrasive tool;
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• (5) activating a spindle housing, generating the vibration-induced microdynamic force in the workpiece direction on the rotating flexible fluid abrasive tool, and inducing the flexible fluid abrasive tool to generate a whirling motion by the vibration-induced microdynamic force, causing dynamic regulation mechanism for a vibration-induced micro-motion polishing slurry, and promoting micro-vibration of a flexible fluid to facilitate a dwell and dynamic trajectory behavior of the flexible fluid abrasive tool, achieving efficient conformal material removal and control of polished surface form accuracy in a region under the combined action of vibration-induced micro-motion.