Calculating method, detecting apparatus, and chip manufacturing method
AssigneeDisco Corporation
InventorsYutaro NOMURA, Takayuki MASADA
Life of this patent
Estimating the term…
Abstract
A calculating method of calculating a shape of a groove formed along a direction parallel to a front surface of a plate-shaped workpiece including positioning a distance measuring unit in such a manner as to face part of the groove of the plate-shaped workpiece, acquiring, with use of the distance measuring unit, information regarding a height of each of two or more of measurement points set in the groove such that positions of the measurement points in a width direction of the groove are different from each other, and calculating the shape of the groove according to the acquired information regarding the height of each of the measurement points.
Claims6
A calculating method of calculating a shape of a groove formed along a direction parallel to a front surface of a plate-shaped workpiece, comprising:
- positioning a distance measuring unit in such a manner as to face part of the groove of the plate-shaped workpiece;
- acquiring, with use of the distance measuring unit, information regarding a height of each of two or more of measurement points set in the groove such that positions of the measurement points in a width direction of the groove are different from each other;
- and
- calculating the shape of the groove according to the acquired information regarding the height of each of the measurement points.
A chip manufacturing method of dividing a plate-shaped workpiece along a plurality of dividing lines set along a front surface of the plate-shaped workpiece to manufacture chips, the method comprising:
- positioning a distance measuring unit in such a manner as to face part of a groove formed in the plate-shaped workpiece along each of the dividing lines;
- acquiring, with use of the distance measuring unit, information regarding a height of each of two or more of measurement points set in the groove such that positions of the measurement points in a width direction of the groove are different from each other;
- calculating a shape of the groove according to the acquired information regarding the height of each of the measurement points;
- and
- forming a dividing groove along each of the dividing lines in the plate-shaped workpiece with reference to the calculated shape of the groove and dividing the plate-shaped workpiece to form chips.
A detecting apparatus which detects a shape of a groove formed along a direction parallel to a front surface of a plate-shaped workpiece, comprising:
- a support table capable of supporting the plate-shaped workpiece;
- and
- a distance measuring unit which faces the plate-shaped workpiece supported on the support table and measures a distance to a measurement point set in the plate-shaped workpiece,
- wherein the plate-shaped workpiece is supported on the support table, the distance measuring unit is positioned in such a manner as to face part of a groove of the plate-shaped workpiece, information regarding a height of each of two or more measurement points set on an inner surface of the groove such that positions of the measurement points in a width direction of the groove are different from each other is acquired with use of the distance measuring unit, and the shape of the groove is calculated according to the acquired information regarding the height of each of the measurement points.
Dependencies are inferred from the claim text.