Optical device, optical system, method for machining a sample by means of laser radiation, and sample

An optical device to machine a sample via laser radiation in at least two machining steps, the optical device comprising:

• at least one beam splitter arranged such that a laser beam impinging on the optical device is adapted to be split into at least two partial beams;
• at least one first optical machining device arranged such that a first partial beam after the beam splitter and after passing through the first optical machining device is adapted to be oriented toward the sample in such a way as to machine the sample in a first machining step in a first machining region;
• at least one second optical machining device arranged such that a second partial beam after the beam splitter and after passing through the second optical machining device is adapted to be oriented toward the sample in such a way as to machine the sample in a second machining step in a second machining region, the second machining region at least partially overlapping the first machining region;
• and
• at least one changer for changing a power density that is configured such that the power density of the first partial beam directed onto the sample is greater than the power density of the second partial beam directed onto the sample.