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AssigneeApplied Materials, Inc.
InventorsSteven Trey Tindel, Paul B. Reuter
Estimating the term…
Disclosed herein is a removable isolation panel for an equipment front end module (EFEM). The removable isolation panel may include a rectangular body having dimensions that approximately correspond to dimensions of one or more filters of the EFEM, a gas inlet, one or more handles to facilitate carrying of the removable isolation panel and positioning of the removable isolation panel into the EFEM, and a gasket at a peripheral edge of the rectangular body to seal the removable isolation panel against a surface of an upper plenum of the EFEM or an EFEM chamber of the EFEM. In some embodiments, the removable isolation panel is configured to flow a gas through the gas inlet towards one or more filters of the EFEM while the EFEM is open to an ambient environment to prevent the one or more filters from absorbing moisture of the ambient environment.
A removable isolation panel for an equipment front end module (EFEM), comprising:
An isolation component for an equipment front end module (EFEM), comprising:
The isolation component of claim 10, wherein the purge gas comprises nitrogen, clean dry air (CDA), or extreme clean dry air (xCDA).
The isolation component of claim 10, further comprising one or more handles coupled to the body.
The isolation component of claim 10, wherein the gasket comprises at least one of a closed cell foam rubber material or a bulb gasket.
The isolation component of claim 10, wherein the surface of the EFEM comprises a bottom surface of an upper plenum of the EFEM or a top surface of an EFEM chamber of the EFEM.
An isolation panel for an equipment front end module (EFEM), comprising:
The isolation panel of claim 15, wherein the one or more filters comprise at least one of a chemical filter or a particle filter.
The isolation panel of claim 15, further comprising one or more handles coupled to the body.
The isolation panel of claim 15, further comprising a desiccant.
The isolation panel of claim 15, wherein the gasket comprises at least one of a closed cell foam rubber material or a bulb gasket.
The isolation panel of claim 15, wherein the body comprises a material selected from the group consisting of:
Dependencies are inferred from the claim text.