Semiconductor chip laser bonding device
AssigneeViatron Technologies Inc.
InventorsHyoung June Kim, Byung Kuk Kim, Maeng Kun Han, Won Yeong Yang, Hyun Kyo Lim, Hyeon Tae Lim, Ji Hye Kim
Life of this patent
Estimating the term…
Loading patent…
AssigneeViatron Technologies Inc.
InventorsHyoung June Kim, Byung Kuk Kim, Maeng Kun Han, Won Yeong Yang, Hyun Kyo Lim, Hyeon Tae Lim, Ji Hye Kim
Estimating the term…
The present invention discloses a semiconductor chip laser bonding device including s laser irradiation module having laser oscillating regions from which a laser beam is oscillated, the laser oscillating regions being extended in a first direction and spaced apar from each other in a second direction, and laser non-oscillating regions from which no laser beam is oscillated, each laser non-oscillating region being arranged between the laser oscillating regions; and a horizontal transfer module configured to move the laser irradiation module in the second direction, wherein when the laser irradiation module irradiates the laser beam onto an upper surface of a bonding substrate on which a semiconductor chip is mounted, the horizontal transfer module reciprocates the laser irradiation module in the second direction.
A semiconductor chip laser bonding device, comprising:
Dependencies are inferred from the claim text.