Automated recipe health optimization

A method, comprising:

• (a) receiving a recipe for a semiconductor fabrication operation, the recipe comprising a plurality of steps, each step having one or more process parameters and each process parameter having a corresponding parameter value;
• (b) identifying a first step of the first recipe;
• (c) performing the first step using a fabrication tool, wherein during performing of the first step one or more cycles are performed of:
• (i) identifying sensor data associated with performing the first step;
• (ii) determining one or more health indicators based on the sensor data;
• and
• (iii) modifying one or more process parameter values of the first step based on the one or more health indicators and the sensor data.

A system for optimizing a recipe, comprising:

• a process chamber;
• and
• one or more processors configured for:
• (a) receiving a recipe for a semiconductor fabrication operation, the recipe comprising a plurality of steps, each step having one or more process parameters and each process parameter having a corresponding parameter value;
• (b) identifying a first step of the first recipe;
• (c) performing the first step in the process chamber, wherein during performing of the first step one or more cycles are performed of:
• (i) identifying sensor data associated with performing the first step;
• (ii) determining one or more health indicators based on the sensor data;
• and
• (iii) modifying one or more process parameter values of the first step based on the one or more health indicators and the sensor data.