Sensor check method and substrate processing system

Abstract

A substrate processing system includes a vacuum transfer module including a vacuum transfer device that transfers a substrate, a position detection sensor that detects a position of the substrate while transferring the substrate by the vacuum transfer device, a transfer device controller that controls an operation of the vacuum transfer device, and a control unit that is communicably connected to the transfer device controller. A sensor check method includes (A) transmitting, from the transfer device controller to the control unit, information on a sensor position recognized by the transfer device controller, (B) determining, by the control unit, whether the position detection sensor is normal or abnormal based on the acquired sensor position, and (C) notifying, when the position detection sensor is determined to be abnormal, information related to an abnormality of the position detection sensor.

Dependencies are inferred from the claim text.