Method for processing workpiece

Abstract

A method for processing a workpiece, includes: a) preparing a mask with a plurality of mask patterns; b) scanning a mask with a line-shaped laser beam by a scanning mechanism, the mask being mounted on a mask stage, the plurality of mask patterns being aligned in scanning bands corresponding to the width of the line-shaped laser beam; c) projecting a pattern beam that passes through the mask onto a workpiece mounted on a processing stage to form a processed pattern in a processing area on the workpiece; and d) adjusting a processing start-position on the workpiece by controlling at least one of the mask stage, the processing stage or the scanning mechanism, in accordance to processing sections in the processing area, the processing sections being defined for at least one mask pattern.

Dependencies are inferred from the claim text.