Induction coil assembly drive system, control method thereof, and semiconductor processing equipment

A control method for an induction coil assembly drive system, comprising:

• determining a theoretical rotation speed of a rotary driver by a controller based on a target lifting speed of an induction coil assembly within a predetermined time length, the theoretical rotation speed being a speed at which the rotary driver uniformly operates within the predetermined time length;
• determining whether the theoretical rotation speed of the rotary driver is less than or equal to the predetermined rotation speed by the controller, wherein the predetermined rotation speed is a critical speed at which the rotary driver generates vibration;
• and
• in response to the theoretical rotation speed of the rotary driver being less than or equal to the predetermined rotation speed, controlling the rotary driver to alternately stop and operate at the target rotation speed within the predetermined time length by the controller to cause the average rotation speed of the rotary driver within the predetermined time length to be equal to the theoretical rotation speed, wherein the target speed is greater than the predetermined rotation speed.

Semiconductor processing equipment, comprising an induction coil assembly drive system, wherein the induction coil assembly drive system includes:

• a rotary driver;
• and
• a lifting assembly, the rotary driver being drivingly connected to the lifting assembly, and the lifting assembly being configured to be transmission-connected to an induction coil assembly to drive the induction coil assembly to move up and down;
• a controller including a processor and a readable storage medium, the readable storage medium storing a program or an instruction that, when executed by the processor, causes the processor to:
• determine a theoretical rotation speed of the rotary driver based on a target lifting speed of the induction coil assembly within a predetermined time length, wherein the theoretical rotation speed is a speed at which the rotary driver operates uniformly within the predetermined time length;
• determine whether the theoretical rotation speed of the rotary driver is less than or equal to a predetermined rotation speed, wherein the predetermined rotation speed is a critical rotation speed at which the rotary driver generates vibration;
• and
• in response to the theoretical rotation speed of the rotary driver being less than or equal to the predetermined rotation speed, control the rotary driver to alternately stop and operate at the target rotation speed within the predetermined time length to cause an average speed of the rotary driver within the predetermine time length to be equal to the theoretical rotation speed, wherein the target rotation speed is greater than the predetermined rotation speed.