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US 2026/0214752 A1Published application
Light source apparatus
AssigneeLasertec Corporation
InventorsJunya KAWAGUCHI, Takahide TAKAMATSU, Masayasu NISHIZAWA, Masaki INOUE
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AssigneeLasertec Corporation
InventorsJunya KAWAGUCHI, Takahide TAKAMATSU, Masayasu NISHIZAWA, Masaki INOUE
Estimating the term…
A light source apparatus capable of reducing deformation of a target holding portion is provided. A light source apparatus according to the present disclosure includes a target holding portion including a cylindrical portion in a cylindrical shape, and a holding surface that holds a target member, the target holding portion holding the target member on the holding surface that rotates around a rotational axis, and a temperature adjusting unit configured to adjust a temperature of the cylindrical portion, the temperature adjusting unit includes an upstanding wall portion arranged to face an outer peripheral surface of the cylindrical portion, and the upstanding wall portion faces at least part of the outer peripheral surface of the cylindrical portion.
A light source apparatus comprising:
Dependencies are inferred from the claim text.