Acoustic wave filter device and method of manufacturing acoustic wave filter device
AssigneeMurata Manufacturing Co., Ltd.
InventorTakashi IWAMOTO
Life of this patent
Estimating the term…
Loading patent…
AssigneeMurata Manufacturing Co., Ltd.
InventorTakashi IWAMOTO
Estimating the term…
An acoustic wave filter device including resonators includes a support including a support substrate with a thickness in a first direction, first and second piezoelectric layers located on a main surface of the support at different positions, and functional electrodes of the resonators on the first piezoelectric layer and the second piezoelectric layer. The resonators include a first resonator in the first piezoelectric layer and a second resonator in the second piezoelectric layer. The first piezoelectric layer includes first and second piezoelectric films that are laminated. Polarization directions of the first and second piezoelectric films differ from each other. A number of piezoelectric films included in the second piezoelectric layer is smaller than a number of the piezoelectric films included in the first piezoelectric layer.
An acoustic wave filter device including a plurality of resonators, the acoustic wave filter comprising:
A method of manufacturing an acoustic wave filter device including a plurality of resonators, the method comprising:
Dependencies are inferred from the claim text.