Method of Plasma Processing a Workpiece
OwnerWeikang FANinventor
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Abstract
To plasma process a workpiece that is susceptible to arcing, a workpiece having an upper portion comprising at least one insulating layer and a lower surface opposite the upper portion is provided. A conductive layer is applied to the lower surface. The workpiece is positioned on a workpiece support of a plasma processing apparatus with the lower surface of the workpiece closest to the workpiece support. The workpiece is plasma processed in the plasma processing apparatus. The plasma processing includes applying a RF electrical signal with an associated RF power to the workpiece support. The conductive layer is removed from the plasma processed workpiece.
Claims20
A method of plasma processing a workpiece that is susceptible to arcing comprising:
- providing a workpiece having an upper portion comprising at least one insulating layer and a lower surface opposite the upper portion;
- applying a conductive layer to the lower surface;
- positioning the workpiece on a workpiece support of a plasma processing apparatus with the lower surface of the workpiece closest to the workpiece support;
- plasma processing the workpiece in the plasma processing apparatus, wherein the plasma processing comprises applying a RF electrical signal with an associated RF power to the workpiece support;
- and
- removing the conductive layer from the workpiece after the plasma processing.
Dependencies are inferred from the claim text.