Beam Apparatus, Lamella Extraction Apparatus, Lamella Observation System, and Lamella Preparation Method

A lamella extraction apparatus comprising:

• a sample stage configured to allow a sample to be placed thereon;
• a lamella transfer part configured to transfer a lamella from the sample;
• a microscope configured to acquire surface information by observing a mark prepared on the sample;
• and
• a control unit configured to control the sample stage or the lamella transfer part to reduce a distance between a position of the mark and a position of the lamella transfer part.

A lamella observation system comprising:

• a beam apparatus configured to prepare a mark on a sloped surface dug toward a lamella prepared in a sample by lamella preparation processing;
• a lamella extraction apparatus including a microscope for observing the mark, and configured to observe the mark and extract the lamella from the sample based on the mark;
• and
• a transmission electron microscope configured to observe the extracted lamella.