Critical process parameter analysis method, critical process parameter analysis device, and computer-readable storage medium

A critical process parameter analysis device comprising:

• a variation evaluation section that evaluates, for each of a plurality of motions included in a manufacturing process of a product, (a) a degree of variation in a system input which is input into a subject system from an outside of the subject system in accordance with a corresponding one of motion parameters which are set to execute the respective plurality of motions and (b) a degree of variation in a system output which is output from the subject system in response to the each of the plurality of motions, the subject system being a subject of the plurality of motions and including a response field exhibiting a response to each of the plurality of motions;
• and
• a critical process parameter candidate specifying section that specifies a critical process parameter candidate from among the motion parameters on a basis of a result of evaluating, for the each of the plurality of motions, the degree of the variation in the system input and the degree of the variation in the system output.

(canceled)